Web11 sep. 2024 · International Filing Date 09.11.2024 IPC G03F 7/20 G03F 9/00 Title A METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND ASSOCIATED APPARATUSES Abstract Disclosed is a method for modeling measurement data over a substrate area relating to a substrate in a lithographic process. Web5 dec. 2024 · In accordance with some embodiments of the present disclosure, an inspection method of a photomask includes performing a first inspection process, …
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Web小菅 雄史 加藤 昌也 吉川 真吾 廣河原 孝一 高見澤 秀吉 jp 2015219324 公開特許公報(a) 20151207 2014101736 20140515 フォトマスクの欠陥検査方法 大日本印刷株式会社 … Web21 mrt. 2011 · IPC: G03F; G01B: Priority date: 21/03/11: Publication status: Published - 2014: Bibliographical note Patent: OCT-13-090 Applicant: ASML Netherlands B.V. … how many people live in woking
CPC Scheme - G03F PHOTOMECHANICAL PRODUCTION OF …
Web12 mei 2013 · International Filing Date 31.05.2013 IPC G03F 7/004 C08F 212/02 G03F 7/039 H01L 21/027 Title ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM AND PATTERN FORMING METHOD USING THE SAME, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND … Webg03f section g — physics g03 photography; cinematography; analogous techniques using waves other than optical waves; electrography; holography g03f photomechanical … Web2 jun. 2024 · The present disclosure relates to the determination of a pattern height of a pattern, which has been produced with extreme ultraviolet (EUV) lithography in a resist … how many people live in winston salem nc